T. Brenner et H. Melchior, INTEGRATED OPTICAL MODESHAPE ADAPTERS IN INGAASP INP FOR EFFICIENT FIBER-TO-WAVE-GUIDE COUPLING/, IEEE photonics technology letters, 5(9), 1993, pp. 1053-1056
A concept for integrated optical modeshape adapters (IOMA's) for effic
ient fiber-to-waveguide coupling is realized in InGaAsP/InP. The integ
rated optical modeshape adapters (IOMA's) combine vertically tapered w
aveguide cores with simultaneously up-tapered upper claddings. Their O
EIC-compatible fabrication process is based on diffusion-limited etchi
ng for the waveguide core tapers and selective area regrowth with LP-M
OVPE for the up-tapered upper claddings, both using the same dielectri
c mask. First realized devices, when coupled to lensed single-mode fib
ers (SMF's), show optical losses as low as 1 dB per facet at 1.53-mum
wavelength.