THE INFLUENCE OF SPUTTERING ON THE SURFACE-COMPOSITION OF FESI AND TBSI1.7

Authors
SWART HC BERNING GLP
Citation
Hc. Swart et Glp. Berning, THE INFLUENCE OF SPUTTERING ON THE SURFACE-COMPOSITION OF FESI AND TBSI1.7, Applied surface science, 73, 1993, pp. 260-263
Citations number
14
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
73
Year of publication
1993
Pages
260 - 263
Database
ISI
SICI code
0169-4332(1993)73:<260:TIOSOT>2.0.ZU;2-5
Abstract
The effect of different (0.5 to 4 keV) Ar+ energy ions on the composit ion of the surfaces of TbSi1.7 and FeSi has been monitored by Auger el ectron spectroscopy. During Ar+ ion bombardment of TbSi1.7 the surface was enriched with Si while the FeSi surface was enriched with Fe. The surface concentration changed in both cases when the ion energy was c hanged. TRIM calculations were used to predict the changes. Radiation- induced segregation assisted by irradiation-enhanced diffusion was use d to explain the concentration changes due to changes in ion energy.