S. Roy et Pn. Pintauro, ANALYSIS OF CONVECTIVE MASS-TRANSFER BY POTENTIAL RELAXATION .5. COPPER DEPOSITION IN THE PRESENCE OF ORGANIC PLATING ADDITIVES, Journal of the Electrochemical Society, 140(11), 1993, pp. 3167-3175
Effective mass-transfer boundary-layer thicknesses at a rotating disk
cathode during copper deposition from a CuSO4/H2SO4 electrolyte contai
ning Cl- ions and a commercial plating additive, either Copper Gleam-P
C or Selrex Cubath-100, have been measured experimentally using the po
tential relaxation technique for i less-than-or-equal-to i(Lim) and di
sk rotation speeds ranging from 30 to 400 rpm. Boundary-layer thicknes
ses with Selrex Cubath additive were in agreement with the Levich equa
tion for all current densities and disk rotation speeds. For Copper Gl
eam-PC, boundary-layer thicknesses were smaller than those predicted b
y the Levich equation for low disk rotation speeds (omega less-than-or
-equal-to 100 rpm) and current densities less-than-or-equal-to 3 5 mA/
cm2. A theoretical convective mass-transfer model with hydrodynamic sl
ip (a nonzero radial velocity) at the disk surface has been developed
to explain the Gleam results and the slip velocity has been correlated
with the fractional surface coverage of Gleam additive which adsorbs
on the disk surface.