SELF-DIRECTED CONTROL OF PULSED-LASER DEPOSITION

Implementation of self-directed control of pulsed laser deposition (PL D) requires actuators, sensors, and a materials and processing knowled ge base. Improvements in quality and reproducibility of material depos its are achieved by driving the process toward desired operating regio ns. Empirical relationships are determined experimentally to describe the complex dynamical interactions of laser parameters. Feedback contr ol based on this description can then be implemented to reduce process disorder and effectively produce consistent coatings with desired pro perties.