Diamond growth on Cu substrates with vapor phase deposition has been s
tudied. Diamond was deposited on Cu substrates using an electron cyclo
tron resonance chemical vapor deposition apparatus. Its growth process
was observed through morphological variation with time in the same fi
eld of vision, which showed that diamond grains on Cu substrates grew
not only through increase of the size of grains but also through their
combination, and that isolated grains at an early stage of growth mig
rated on the substrate as if they were attracted by each other. This m
anner of diamond growth is specific to cases where Cu is used as the s
ubstrate.