MEASUREMENT OF ION TEMPERATURE IN ELECTRON-CYCLOTRON-RESONANCE PLASMA

Ion temperatures parallel and perpendicular to an applied magnetic fie ld are measured in electron cyclotron resonance (ECR) plasmas under a divergent or a mirror magnetic field configuration using a directional analyzer. The temperatures obtained as a function of gas pressure are found to be low (0.2 approximately 0.5 eV) and are compared with thos e measured by optical emission spectroscopy of Doppler profiles. The t emperatures perpendicular to the magnetic field from the two different methods agree well for both magnetic configurations. The reliability of the measurement using the directional analyzer is discussed conside ring the ion motions in the sheath in front of the analyzer and in the magnetic field.