AGGLOMERATION OF SUBMONOLAYER AG FILMS ON SI(111) INDUCED BY THE INTERACTION WITH ATOMIC-HYDROGEN

We have used Auger electron spectroscopy to characterize the agglomera tion of Ag layers with coverages of 0.2 to 1.2 ML induced by the inter action with atomic hydrogen. Originally uniform Ag films agglomerate d uring the interaction with atomic hydrogen to form Ag islands. The mod el calculations of Ag and Si Auger peak intensities after complete Ag agglomeration have been performed for the case of island growth. Our r esults have shown that the height of Ag islands increases with the inc rease of the original Ag coverage, while the total area covered by Ag islands is constant and independent of the original Ag coverage.