PECULIARITIES OF THE O-16(ALPHA,ALPHA)O-16 3.045 MEV RESONANCE SCATTERING AND ITS APPLICATION TO INVESTIGATION OF OXYGEN IN SILICON

Authors
SOROKA VI ARTSIMOVICH MV LOBACH IY MOGILNIK IF PAVLOVICH VN TOKAREVSKY VV KUDRIAVTSEV EM ROMANJUK BN
Citation
Vi. Soroka et al., PECULIARITIES OF THE O-16(ALPHA,ALPHA)O-16 3.045 MEV RESONANCE SCATTERING AND ITS APPLICATION TO INVESTIGATION OF OXYGEN IN SILICON, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 83(3), 1993, pp. 311-318
Citations number
29
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
83
Issue
3
Year of publication
1993
Pages
311 - 318
Database
ISI
SICI code
0168-583X(1993)83:3<311:POTO3M>2.0.ZU;2-O
Abstract
The elastic scattering of alpha particles by oxygen in the vicinity of the 3.045 MeV resonance was studied with the aim of its use in nuclea r microanalysis. The O-16(alpha, alpha)O-16 resonance scattering was u sed to investigate the theoretically predicted effect of resonant lase r-induced diffusion of impurities in crystals and to determine the lat tice site location of oxygen in silicon using the channelling techniqu e.