Positron lifetime investigations on B-doped and undoped chemical vapor
deposition diamond films have shown that B-doping at 500 ppm almost c
ompletely removes vacancies from the film. The 1.68 eV photo luminesce
nce (PL) line is also removed. For undoped films, large concentrations
(almost-equal-to 10(18) cm-3) of Vacancy clusters (approximately 6 va
cancies) and mono- or divacancies are observed. Small observable effec
ts arising. from annealing up to 1100-degrees-C could be found in both
B-doped or undoped films. There is no correlation between the width o
f the 1.68 eV PL line and the vacancy concentration.