Dp. Osterman et al., AN X-RAY MICROCALORIMETER WITH KINETIC INDUCTANCE THERMOMETER AND DC SQUID READ-OUT, Journal of low temperature physics, 93(3-4), 1993, pp. 251-256
This article reports on the development of a microcalorimeter for X-ra
y spectroscopy Which uses a superconducting kinetic inductance thermom
eter. The monolithic construction combines the thermometer and all oth
er components on a single substrate. These include a dc SQUID for meas
uring the thermometer output, and a micromachined ''leg and panel'' st
ructure for low thermal conductance and capacitance. An all-niobium pr
ototype has been fabricated, and its operation verified qualitatively
above 4 K