PHYSICS, FABRICATION, AND CHARACTERIZATION OF THIN-FILMS

Authors
KRAUS H GUTSCHE M JOCHUM J KEMMATHER B
Citation
H. Kraus et al., PHYSICS, FABRICATION, AND CHARACTERIZATION OF THIN-FILMS, Journal of low temperature physics, 93(3-4), 1993, pp. 533-542
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Journal of low temperature physics → ACNP
ISSN journal
00222291
Volume
93
Issue
3-4
Year of publication
1993
Pages
533 - 542
Database
ISI
SICI code
0022-2291(1993)93:3-4<533:PFACOT>2.0.ZU;2-U
Abstract
Superconducting tunnel junctions as well as transition edge thermomete rs could benefit from high quality thin films. We point out the import ant features of various cryo detectors and show where high purity, or even epitaxially grown films are advantageous for detector performance . Some fabrication methods are discussed and methods of film character ization introduced. Photolithography has proven necessary to fabricate the complex structure of the present cryo detectors.