SURFACE MICROANALYSIS

Methods are discussed which combine surface, interface and thin-film m easurements with the analysis of limited spatial domains. The progress which is now occurring rapidly is illustrated. The methods treated ar e selected from the beam-imaging methods, based on electron, ion, x-ra y beam and laser interaction with the solid sample. Two examples are g iven concerned on one side with the ion microprobe analysis of micro s tructures in electronic devices and on the other side with the charact erization of surface-modified asbestos by electron energy loss spectro metry and electron spectroscopic imaging.