T. Hanawa et al., X-RAY PHOTOELECTRON-SPECTROSCOPY OF CALCIUM-ION-IMPLANTED TITANIUM, Journal of electron spectroscopy and related phenomena, 63(4), 1993, pp. 347-354
The surface of titanium before and after calcium-ion implantation by a
mounts of 10(16), 10(17), and 10(18) ions CM-2, has been characterized
using X-ray photoelectron spectroscopy (XPS). The XPS data reveal tha
t the structure of the surface modified layer of calcium-ion-implanted
titanium is TiO2 containing a calcium oxide and a complex oxide of ca
lcium and titanium near the surface. Binding-energy data on calcium-io
n-implanted titanium are also supplied.