ELECTRICAL AND OPTICAL CHARACTERIZATION OF SBSNO2

Authors
HE YS CAMPBELL JC MURPHY RC ARENDT MF SWINNEA JS
Citation
Ys. He et al., ELECTRICAL AND OPTICAL CHARACTERIZATION OF SBSNO2, Journal of materials research, 8(12), 1993, pp. 3131-3134
Citations number
10
Categorie Soggetti
Material Science
Journal title
Journal of materials research → ACNP
ISSN journal
08842914
Volume
8
Issue
12
Year of publication
1993
Pages
3131 - 3134
Database
ISI
SICI code
0884-2914(1993)8:12<3131:EAOCOS>2.0.ZU;2-V
Abstract
Films of Sb:SnO2 have been formed by vacuum e-beam evaporation. The st ructural, electrical, and optical properties of these films have been investigated with respect to annealing time and temperature. After hea t treatment in an oxygen atmosphere, thin films with a peak transmitta nce of 98% and 4-9 x 10(-3) OMEGAcm resistivity have been obtained. Th e barrier heights and energy band diagrams of Sb:SnO2/Si n-n and p-n h eterojunctions have been determined by C-V measurements.