PARADOXICAL SPATIAL-DISTRIBUTION OF THE ELECTRON-TEMPERATURE IN A LOW-PRESSURE RF DISCHARGE

Authors
GODYAK VA PIEJAK RB
Citation
Va. Godyak et Rb. Piejak, PARADOXICAL SPATIAL-DISTRIBUTION OF THE ELECTRON-TEMPERATURE IN A LOW-PRESSURE RF DISCHARGE, Applied physics letters, 63(23), 1993, pp. 3137-3139
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
63
Issue
23
Year of publication
1993
Pages
3137 - 3139
Database
ISI
SICI code
0003-6951(1993)63:23<3137:PSOTEI>2.0.ZU;2-Q
Abstract
Spatially resolved probe measurements of the electron energy distribut ion function (EEDF) in a capacitive rf discharge in argon reveal that the electron temperature decreases with increasing plasma heating rf f ield. This paradoxical behavior in the electron temperature distributi on in an inhomogeneous rf field is shown to be the combined effect of nonlocal electron kinetics and a non-Maxwellian EEDF typical of a low pressure capacitive rf discharge in a Ramsauer gas.