A scanning tunneling microscopy (STM) study was carried out for a stru
ctural change of the Si(111) surface induced by the desorption of hydr
ogen (H-) atoms from hydrogenated Si-clusters on a Si(111)-1 x 1 : H s
urface. After the complete desorption of the H-atoms, a new surface re
construction of square-root 3 x square-root 3 R30-degrees: Si was foun
d near 535-degrees-C, which is characterized by the Si-adatom arrangem
ent at T4 sites on the Si(111)-1 x 1 surface. The appearance of this r
econstruction can be explained by the redistribution of Si-adatom from
the Si-clusters on Si(111)-1 x 1 surface during H-desorption.