SUPERCONDUCTING AND STRUCTURAL CHARACTERISTICS OF YBA2CU3O7-X THIN-FILMS ON SI(001) SUBSTRATES WITH YSZ BUFFER LAYERS

We have prepared high quality c-axis oriented superconducting YBa2Cu3O 7-x thin films on Si(001) substrates covered with YSZ = (ZrO2 + 10 at. % Y2O3) layers by an in situ high pressure (3-5 mbar) oxygen d.c./r.f. sputtering process at substrate temperatures of about 750 degrees C. The films were characterized by X-ray diffraction, transmission electr on microscopy (TEM) and electron scanning (SEM) techniques. A supercon ducting transition temperature Tc(R similar or equal to 0)= 89 K was d etermined by resistivity and susceptibility measurements. Cross sectio nal TEM analysis showed a sharp interface between YSZ and Si;however a n inter diffusion zone was observed between YSZ and YBa2Cu3O7-x layers .