MEASUREMENT OF GAS TEMPERATURE PROFILE IN DISCHARGE REGION OF EXCIMER-LASER WITH LASER SCHLIEREN METHOD

Shock waves are generated by pulse discharges in the cavity of excimer lasers. The shock waves cause arcing, nonhomogeneous excitation of la ser gas and limitation of repetition rate of a high-repetition-rate ex cimer laser. Distribution of temperature rise by pulse discharge is an essential factor for generation and propagation of shock waves. Gas t emperature profiles in the discharge region of the excimer laser cavit y are measured by a laser schlieren method for single-pulse operations . The results show that the temperature distribution depends on the xe non concentration. In the cases of pure helium and higher xenon concen tration, the temperature distributions are steeper than those in the c ases of lower xenon concentration.