LASER-SCANNING MODE INTERFERENCE CONTRAST MICROSCOPE AND ITS APPLICATION TO STEP HEIGHT MEASUREMENT

Authors
OOKI H ARIMOTO R SHIONOYA T MATSUURA K IWASAKI J
Citation
H. Ooki et al., LASER-SCANNING MODE INTERFERENCE CONTRAST MICROSCOPE AND ITS APPLICATION TO STEP HEIGHT MEASUREMENT, JPN J A P 1, 32(11A), 1993, pp. 4998-5001
Citations number
6
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS → ACNP
Volume
32
Issue
11A
Year of publication
1993
Pages
4998 - 5001
Database
ISI
SICI code
Abstract
The image contrast of the laser scanning mode interference contrast (L ASMIC) microscope is described. Some experimental results show the hig h performance of the LASMIC microscope in visualizing small phase chan ges on the surface of the sample. Furthermore, as a new application of the LASMIC microscope, quantitative measurement of step heights using LASMIC signals is proposed. The principle of this measurement is desc ribed theoretically and its effectiveness is verified experimentally.