ULTRAFINE PARTICLE-BEAM DEPOSITION .1. SAMPLING AND TRANSPORTATION METHODS FOR ULTRAFINE PARTICLES

A new approach using a system in vacuo with a dynamic gas flow named ' 'ultrafine particles beam deposition,'' was proposed as a technique fo r handling ultrafine particles. To create a gas beam flow, three types of sampling and transportation methods for ultrafine particles were t ested. In these sampling and transportation methods, the sampling meth od using a skimmer and differential pumping gave the best results sinc e it enables sampling of hot ultrafine particles soon after they are p roduced and carries them without collision in a directional gas flow. A narrow size distribution for ultrafine particles ranging from 3 nm t o 13 nm could be obtained in the case of ultrafine Fe particles. As a result, the deposited film obtained using.such small ultrafine particl es showed a metallic luster as grown and characteristics such as speci fic electric resistance, coercive force and crystalline property simil ar to those of bulk Fe metal.