THE DISILICIDES OF TUNGSTEN, MOLYBDENUM, TANTALUM, TITANIUM, COBALT, AND NICKEL, AND PLATINUM MONOSILICIDE - A SURVEY OF THEIR THERMODYNAMIC PROPERTIES

A critical evaluation is presented of the thermodynamic properties of six disilicides and one monosilicide that are important in the manufac ture of very large scale integrated circuits. Values of the standard m olar enthalpies of formation Delta(f)H(m) degrees at T = 298.15 K and p degrees = 0.1 MPa are recommended as follows: WSi2 -(79 +/- 5) kJ.mo l(-1); MoSi2, - (137 +/- 4) kJ.mol(-1); TiSi2, -(171 +/- 11) kj.mol(-1 ); CoSi2, -(103 +/- 15) kJ.mol(-1); NiSi2, -(88 +/- 12) kJ.mol(-1); Ta Si2, -(120 +/- 20) kJ.mol(-1); and PtSi, -(119 +/- 7) kJ.mol(-1). Equa tions are given for the molar enthalpy increments of some of the silic ides along with a few evaluated standard Gibbs free energies of format ion. Brief descriptions of methods of synthesis and limited structural information have also been included.