Lithium phthalocyanine (LiPc) represents one of the first intrinsic or
ganic semiconductors. For possible applications, the preparation of th
in films of this material is most important. We prepared films in the
thickness range between 2 and 2000 nm by vacuum deposition. The influe
nce of different substrates and their temperature T(s) during depositi
on is observed to modify the dominant stacking orientation. At high te
mperatures of T(s) epitaxial growth of single crystals is found on mic
a substrates. The structure of representative films is investigated by
electron transmission microscopy and electron diffraction. The anisot
ropy of the films influences the angle-dependent magnetic properties a
s the linewidth DELTAB1/2 and the g factor of ESR experiments.