SYNCHROTRON-RADIATION SOURCES AND CONDENSERS FOR PROJECTION X-RAY-LITHOGRAPHY

The design requirements for a compact electron storage ring that could be used as a soft-x-ray source for projection lithography are discuss ed. The design concepts of the x-ray optics that are required for coll ecting and conditioning the radiation in divergence, uniformity, and d irection to illuminate the mask correctly and the particular x-ray pro jection camera used are discussed. Preliminary designs for an entire s oft-x-ray projection lithography system that uses an electron storage ring as a soft-x-ray source are presented. It is shown that, by combin ing the existing technology of storage rings with large collection ang le condensers, a powerful and reliable source of 130-angstrom photons for production line projection x-ray lithography is possible.