INVESTIGATION OF DISTORTION AND DAMAGE OF MOLYBDENUM SILICON MULTILAYER REFLECTIVE COATINGS WITH HIGH-INTENSITY ULTRAVIOLET-RADIATION

Studies are performed to determine an upper limit on the optical damag e threshold of a soft-x-ray molybdenum-silicon multilayer reflective c oating by the use of a 308-nm, 15-ns pulse from a Xe-Cl excimer laser in order to simulate the potential damage induced by the x-ray flux fr om a pulsed laser-produced plasma. Experimental results yield a value of 0.26 J/cm2 to produce visible signs of damage as determined by opti cal microscopy. Experiments are conducted first on silicon, as a refer ence point of a bulk material, and then applied to molybdenum-silicon in an effort to facilitate a theoretical comparison between a simple a nd a more complicated material. Theoretical predictions are in reasona ble agreement with experimental results, but suggest that a lower valu e of 0.085 J/cm2 might cause significant thermal-induced damage.