SOFT-X-RAY PROJECTION IMAGING WITH A 1 1 RING-FIELD OPTIC/

Authors
MACDOWELL AA BJORKHOLM JE EARLY K FREEMAN RR HIMEL MD MULGREW PP SZETO LH TAYLOR DW TENNANT DM WOOD OR BOKOR J EICHNER L JEWELL TE WASKIEWICZ WK WHITE DL WINDT DL DSOUZA RM SILFVAST WT ZERNIKE F
Citation
Aa. Macdowell et al., SOFT-X-RAY PROJECTION IMAGING WITH A 1 1 RING-FIELD OPTIC/, Applied optics, 32(34), 1993, pp. 7072-7078
Citations number
8
Categorie Soggetti
Optics
Journal title
Applied optics → ACNP
ISSN journal
00036935
Volume
32
Issue
34
Year of publication
1993
Pages
7072 - 7078
Database
ISI
SICI code
0003-6935(1993)32:34<7072:SPIWA1>2.0.ZU;2-0
Abstract
A molybdenum/silicon multilayer-coated 1:1 ring-field optic with a num erical aperture of 0.0835 is used to carry out soft-x-ray projection i maging with undulator radiation at 12.9 nm. An ideal optic of this typ e should be able to image 0.1-mum features with a contrast exceeding 9 0% at this wavelength. The useful resolution of our ring-field optic i s experimentally found to be approximately 0.2 mum, probably because o f the presence of substrate figuring errors.