COMPUTER-SIMULATION OF THE DEVELOPMENT OF DISH-SHAPED DEEPENINGS BY ORIENTATION-DEPENDENT ETCHING OF (100) SILICON

Authors
DIETRICH D FRUHAUF J
Citation
D. Dietrich et J. Fruhauf, COMPUTER-SIMULATION OF THE DEVELOPMENT OF DISH-SHAPED DEEPENINGS BY ORIENTATION-DEPENDENT ETCHING OF (100) SILICON, Sensors and actuators. A, Physical, 39(3), 1993, pp. 261-262
Citations number
4
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
39
Issue
3
Year of publication
1993
Pages
261 - 262
Database
ISI
SICI code
0924-4247(1993)39:3<261:COTDOD>2.0.ZU;2-L