AN INTEGRATED-OPTIC ADIABATIC TE TM MODE SPLITTER ON SILICON

A compact integrated optic fundamental TE/TM mode splitter, based on t he mode-sorting characteristics of an asymmetrical adiabatic Y junctio n of optical waveguides exhibiting shape birefringence, operating at 1 550 nm, has been designed using the discrete sine method (DSM) and the beam propagation method (BPM), realized, and tested. The structures w ere fabricated in a system of SiO2, SiO(x)N(y), and Si3N4 layers, usin g a low-temperature plasma-enhanced chemical-vapor deposition (PECVD) process, compatible with standard silicon IC processing.