Epitaxial films of YBa2Cu3O7 have been grown on KTaO3 (100) single-cry
stal substrates by means of reactive thermal coevaporation at temperat
ures between 560 and 750-degrees-C. The orientation of the YBa2Cu3O7 c
rystallographic c axis in these films was perpendicular to the substra
te surface throughout the complete range of deposition temperatures ev
en though the KTaO3 lattice constant represents a better match to the
YBa2Cu3O7 c axis than to the a and b axes. Since the nucleation and gr
owth of YBa2Cu3O7 films are known to be relatively sensitive to the fo
rmation of a-axis-oriented grains at imperfections on the substrate ma
terial, an investigation of the influence of the substrate surface fin
ish on the film properties was carried out. Using substrates with appr
opriately prepared surfaces, YBa2Cu3O7 films exhibited a high degree o
f crystalline perfection, zero resistance at temperatures of 89 K and
critical current densities up to 3 X 10(6) A/cm2.