The thermal expansivity of chemical vapor deposition (CVD) grown diamo
nd films has been measured from 30 to 700 degrees C by two different t
echniques. The macroscopic expansivity was determined by standard dila
tometric methods, while the microscopic thermal expansivity was measur
ed from the shift of large angle X-ray diffraction peaks. The expansiv
ities, as determined from both techniques, are in agreement, within th
eir experimental errors, but larger than published values for bulk dia
mond. The difference is assumed to be the result of the presence of no
n-diamond carbon and defect inclusions in the CVD films.