DIAMOND THIN-FILMS SYNTHESIZED BY A MULTINOZZLE OXY-ACETYLENE CHEMICAL-VAPOR-DEPOSITION METHOD

Diamond thin films were fabricated using a custom-made multinozzle oxy -acetylene flame apparatus. These films were characterized by scanning electron microscopy, X-ray diffraction and Raman spectroscopy. Experi mental results show that this multinozzle combustion flame technique c an produce high quality diamond films, as judged by Raman spectroscopy , with relatively large deposition areas. The surface morphology, crys tal structure and optical properties of these films are found to be gr eatly affected by processing parameters, such as substrate temperature , gas ratio of acetylene to oxygen, and the configuration of the multi nozzle. Compared with the single-nozzle oxy-acetylene flame technique, this multinozzle method has greater potential for obtaining large-are a diamond film coatings. However, more engineering design and investig ation are needed. The uniformity of these films and the relationship b etween the deposition conditions and their properties are discussed.