LOW-ENERGY-ELECTRON MICROSCOPY STUDIES OF GE AND AG GROWTH ON SI(111)

Citation
Awd. Vandergon et al., LOW-ENERGY-ELECTRON MICROSCOPY STUDIES OF GE AND AG GROWTH ON SI(111), Thin solid films, 236(1-2), 1993, pp. 140-145
Citations number
23
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
ISSN journal
00406090
Volume
236
Issue
1-2
Year of publication
1993
Pages
140 - 145
Database
ISI
SICI code
0040-6090(1993)236:1-2<140:LMSOGA>2.0.ZU;2-V
Abstract
In this paper we demonstrate how low energy electron microscopy can be used to study in situ, and in real time, the growth of thin films on single-crystal surfaces. By studying the growth of Ge and Ag on both t he clean and the Sb-terminated Si(lll) surface we show how nucleation, growth, island formation, island shapes, thermal stability and the fo rmation of dislocations in the grown films may be observed. Pre-adsorp tion of Sb strongly modifies the growth of Ge and Ag films on Si(lll), leading to more uniform coverage and smoother films in both cases.