In order to further our interpretation of nanoindentation data from co
ated systems, and to learn more about the systems themselves, several
hydrogenated amorphous carbon (a-C:H) coated systems have been investi
gated with systematic variations in coating thickness and substrate ch
aracteristics. Three different substrates have been used: a tool steel
(M42), a semi-plastic ceramic single crystal (MgO) and a polymer (pol
ytetrafluorethylene (PTFE)), each. with chemically vapour-deposited a-
C:H coatings of thickness 0.1-1 mu m. Low load indentation experiments
were performed with a Nano IndenterTM II with indenter displacements
typically less than, or of the order of, the nominal coating thickness
es. The resultant data have been analysed in terms of load-displacemen
t curves and various comparative parameters (e.g. hardness, total disp
lacements and elastic recovery) derived from them. High resolution sca
nning electron microscopy has also been used to examine the deformatio
n structures at the indentation sites, the occurrence of various crack
types in the coating being of particular interest. Our results clearl
y show how the change in near-surface elastic and plastic properties c
onferred by the coating can be characterized for a given system. Gener
ally, the coatings were found to support part of the load and to delay
the elastic-plastic transition in surface deformation behaviour to hi
gher loads. The MgO studies clearly demonstrate that ''pop-ins'' in th
e load-displacement curves can arise from dislocation generation in th
e substrate as well as crack propagation in the coatings. The PTFE stu
dies demonstrate how the viscoelastic response of the substrate can be
modified by the coating.