SYNTHESIS OF OXIDE LAYERS ON SILICON POLYDIOXIDE BY MOLECULAR DEPOSITION WITH METHOXYL FUNCTIONAL-GROUPS

The surface chemical reactions of the methoxyl functional groups of si lica with TiCl4 and SnCl4 were investigated. The possibility of using silicon polydioxide (dispersed silica) in synthesis by molecular depos ition of methoxyl groups (-OCH3) was investigated during the synthesis of SnO2 layers.