We have used the periodic extended Huckel method to examine the initia
l stages of the hydrogenation of Si(111) 7 x 7. Energies, atomic charg
es and reduced overlap populations are considered, and we discuss the
inequivalence of the adatoms. The adatom dangling bond (DB) level posi
tions with respect to E(F) are also discussed. On the basis of our res
ults, we propose the following adsorption sequence: first, saturation
of the five occupied adatom DBs, then hydrogenation of the remaining a
toms by pairs, the hydrogenation of an adatom being coupled with that
of a restatom or that of the comer atom. We also show that the atomic
charges of the surface become more uniform when the 19 DBs are saturat
ed, and that this modification occurs in discontinuous stages.