STRESS-INDUCED VOID FORMATION IN METAL LINES

Authors
FLINN PA MACK AS BESSER PR MARIEB TN
Citation
Pa. Flinn et al., STRESS-INDUCED VOID FORMATION IN METAL LINES, MRS bulletin, 18(12), 1993, pp. 26-35
Citations number
32
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
18
Issue
12
Year of publication
1993
Pages
26 - 35
Database
ISI
SICI code
0883-7694(1993)18:12<26:SVFIML>2.0.ZU;2-K