PHYSICAL-PROPERTIES OF SIO2 AND ITS INTERFACE TO SILICON IN MICROELECTRONIC APPLICATIONS

Authors
WEBER W BROX M
Citation
W. Weber et M. Brox, PHYSICAL-PROPERTIES OF SIO2 AND ITS INTERFACE TO SILICON IN MICROELECTRONIC APPLICATIONS, MRS bulletin, 18(12), 1993, pp. 36-42
Citations number
17
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
18
Issue
12
Year of publication
1993
Pages
36 - 42
Database
ISI
SICI code
0883-7694(1993)18:12<36:POSAII>2.0.ZU;2-S