GROWTH OF Y2O2SEU THIN-FILMS BY REACTIVE MAGNETRON SPUTTERING AND ELECTROLUMINESCENT CHARACTERISTICS

Y2O2S:Eu phosphor films were prepared by reactive magnetron sputtering with a Y2O3:Eu target in a H2S and argon mixed atmosphere, and hot ca rrier injection (HCI)-type EL devices with Y2O2S:Eu/ZnS/y2O2S:Eu struc ture were fabricated. It is found that the crystal structure of Y2O2S: Eu films depends on the sulfur concentration in the film. With increas ing atomic ratios of S/Y, the crystal phase is changed from cubic to h exagonal. Luminescent spectra from the films are dependent on the crys tal structures.