P. Hlidek et al., PHOTOVOLTAIC SPECTRA OF HGCDTE DIODES FABRICATED BY ION-BEAM MILLING, Semiconductor science and technology, 8(12), 1993, pp. 2069-2071
A simple non-destructive method for investigating ion-beam-milled samp
les is based on measurement of their optical absorption and photovolta
ic responsivity. By comparing the two spectra, the p-n junction depth
(i.e. the efficiency of ion beam milling) can be estimated.