Ia. Sokolov et al., EFFECT OF SODIUM ON GA AND AS CHEMICAL-STATES IN THE SURFACE-LAYER OFGAAS POLISHED WITH NAOCL, Semiconductor science and technology, 8(12), 1993, pp. 2184-2186
We performed an XPS investigation of a (100) GaAs surface chemically p
olished with NaOCl aqueous solutions (C(NaOCl) = 60 g l-1) containing
NaOH. At C(NaOH) > 2 g l-1 the sodium adsorbate has been detected in s
amples. Na adatoms are chemically bonded to Ga and As, forming, it is
assumed, Na3As and NaGa(OH), phases in the surface layer. On the basis
of photoemission data and our previous results we propose a model mec
hanism for dissolution of GaAs in sodium hypochlorite.