A new production method for a large diameter microwave plasma is propo
sed without magnetic coils. An annular slot antenna and two ring-typed
permanent magnets are used for the generation of high density plasma
in the circumference of a chamber with the plasma confinement and diff
using to the central region. The optimum arrangement of components in
the device is examined for the production of the large diameter unifor
m plasma. The almost uniform electron density of about 4x10(10) cm-3 i
s realized, and the plasma with two electron temperatures is observed.
The measurement with a directional ion energy analyzer reveals that i
ons are almost isotropic.