PRODUCTION OF LARGE-DIAMETER MICROWAVE PLASMA USING AN ANNULAR SLOT ANTENNA

A new production method for a large diameter microwave plasma is propo sed without magnetic coils. An annular slot antenna and two ring-typed permanent magnets are used for the generation of high density plasma in the circumference of a chamber with the plasma confinement and diff using to the central region. The optimum arrangement of components in the device is examined for the production of the large diameter unifor m plasma. The almost uniform electron density of about 4x10(10) cm-3 i s realized, and the plasma with two electron temperatures is observed. The measurement with a directional ion energy analyzer reveals that i ons are almost isotropic.