A SOFT-X-RAY EMISSION STUDY OF HFCVD DIAMOND FILMS

We present carbon K emission spectra of hot filament chemical vapour d eposited (HFCVD) diamond films excited with electrons and high-resolut ion monochromatic undulator radiation. The differences in the band spe ctra of electron excited films grown under various conditions can be u sed to characterize the films. The spectrum of natural diamond, excite d by synchrotron radiation, exhibits a large dependence on excitation energy. Furthermore, when tuning the excitation beam of the soft X-ray s to particular energies, the emission bands of the films show large d ifferences, i.e. differences in the spectra that are small for electro n excitation can be enlarged considerably when exciting with tunable s ynchrotron radiation. A number of other commonly used characterization methods, such as X-ray diffraction, Raman spectroscopy, Auger electro n spectroscopy and scanning electron microscopy, were used to compare with the results from the soft X-ray emission study.