THE CHEMICAL BASIS OF THE C-H-O PHASE-DIAGRAM IN DIAMOND PLASMA DEPOSITIONS

The chemical origin of the C-H-O phase diagram of diamond plasma depos ition methods has been presented. According to the suggested chemical reactions, in almost all C-H-O-gas-containing plasmas the principal re actions begin with carbon removal by oxygen to the very stable CO. The rest of the gases during diamond deposition can be regarded as basica lly the same with the first successful diamond plasma consisting of a Few per cent of hydrocarbons diluted in hydrogen gas. The suggested re actions result in successful diamond depositions only above the H-CO l ine in the C-H-O phase diagram.