Electron irradiation at room temperature introduces in GaAs a donor ty
pe electronic state Tx at 0.18eV, which is associated with the E3 elec
tron trap. The presence of Tx is observed at depths d > 1.5 mu m, whic
h correspond to the limits of the depletion region under the highest a
pplied reverse bias voltage, while the E3 trap concentration drops off
into the same region.