B. Han et al., SUITABILITY OF METALORGANIC CHEMICAL-VAPOR DEPOSITION-DERIVED PRGAO3 FILMS AS BUFFER LAYERS FOR YBA2CU3O7-X PULSED-LASER DEPOSITION, Applied physics letters, 63(26), 1993, pp. 3639-3641
Phase-pure thin films of the YBa2Cu3O7-x (YBCO) lattice matched and lo
w loss tangent perovskite insulator PrGaO3 have been grown in situ on
single-crystal (110) LaAlO3 substrates by metalorganic chemical vapor
deposition (MOCVD). Films were grown at temperatures of 750-800-degree
s-C using beta-diketonate precursors M(dpm)3 (M=Pr,Ga; dpm =dipivaloyl
methanate). YBCO films were then grown on the MOCVD-derived PrGaO3 by
pulsed laser deposition (PLD). Scanning electron microscopy reveals th
at the PrGaO3 films have smooth, featureless surfaces. As assessed by
x-ray diffraction, the PrGaO3 films grow epitaxially on LaAlO3 with a
high degree of (001) and/or (110) plane orientation parallel to the su
bstrate surface, and the subsequent YBCO films grow with a (001) orien
tation. Rocking curve and phi-scan analyses reveal that the PrGaO3 and
YBCO films grow epitaxially. Cross-sectional high resolution electron
microscopy and transmission electron microscopic selected area diffra
ction confirm that the PrGaO3 and YBCO layers grow epitaxially. YBCO f
ilms grown by PLD on the MOCVD-derived PrGaO3 exhibit T(c) = 91 K and
J(c) = 6 X 10(6) A/cm2 at 77 K in zero field.