PHTHALOCYANINES ULTRATHIN ALTERNATING LAYER FILM ON SILICON, PREPAREDBY MOLECULAR-BEAM DEPOSITION

Copper-phthalocyanine (CuPc) and magnesium-phthalocyanine (MgPc) were alternatively deposited on silicon substrates by organic molecular bea m deposition. The thickness of each layer was varied in the range 3.0- 10.0 nm. The layered structure of the film was confirmed by secondary ion mass spectrometry depth profiling and cross-sectional observations with a transmission electron microscope. The molecular orientation wi thin a film was estimated by Fourier transform IR spectroscopy. The me asurements suggested that the planar molecules of CuPc and MgPc were i nclined at an angle of 22 degrees with respect to the substrate surfac e.