T. Nonaka et al., PHTHALOCYANINES ULTRATHIN ALTERNATING LAYER FILM ON SILICON, PREPAREDBY MOLECULAR-BEAM DEPOSITION, Thin solid films, 237(1-2), 1994, pp. 87-90
Copper-phthalocyanine (CuPc) and magnesium-phthalocyanine (MgPc) were
alternatively deposited on silicon substrates by organic molecular bea
m deposition. The thickness of each layer was varied in the range 3.0-
10.0 nm. The layered structure of the film was confirmed by secondary
ion mass spectrometry depth profiling and cross-sectional observations
with a transmission electron microscope. The molecular orientation wi
thin a film was estimated by Fourier transform IR spectroscopy. The me
asurements suggested that the planar molecules of CuPc and MgPc were i
nclined at an angle of 22 degrees with respect to the substrate surfac
e.