THE EFFECT OF SUBSTRATE-TEMPERATURE ON THE PROPERTIES OF SPUTTERED TIN OXIDE-FILMS

Authors
MENG LJ DOSSANTOS MP
Citation
Lj. Meng et Mp. Dossantos, THE EFFECT OF SUBSTRATE-TEMPERATURE ON THE PROPERTIES OF SPUTTERED TIN OXIDE-FILMS, Thin solid films, 237(1-2), 1994, pp. 112-117
Citations number
22
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
237
Issue
1-2
Year of publication
1994
Pages
112 - 117
Database
ISI
SICI code
0040-6090(1994)237:1-2<112:TEOSOT>2.0.ZU;2-G
Abstract
Tin oxide thin films have been deposited on glass substrates by the d. c. reactive magnetron sputtering method. The dependence of electrical, structural and optical properties of films on the substrate temperatu re was studied. The single-oscillator model was used to fit the disper sion of the refractive index with the wavelength. Rayleigh-type scatte ring was assumed for explaining the variation of the transmittance.