A compact Schwarzschild soft X-ray microscope using a laser-produced p
lasma soft X-ray source has been developed. The laser-produced plasma
source, which is small but of high brilliance, has made it possible to
use the soft X-ray microscope in a small laboratory. The microscope i
s composed of a Schwarzschild objective and a grazing incidence mirror
condenser. Image contrast for biological specimens in soft X-ray regi
ons is investigated briefly. It is possible to observe the fine struct
ures of a thin specimen at a wavelength of 15 nm; at this wavelength h
igh-contrast images of biological specimens have been obtained with a
single laser shot of pulse width of 8 ns at a resolution of 0.3 mu m.
The resolution of the system is limited by the detector.