CALCULATION OF A TOPOGRAPHIC CONTRAST IN THE SCANNING ELECTRON-MICROSCOPE

A direct simulation of electron scattering in solids is developed. Usi ng this simulation, a topographic contrast found in the scanning elect ron microscope is quantitatively discussed. The surface topography stu died here is a rectangular rod pattern and a rectangular groove patter n at an infinite horizontal plane surface of Al. We quantify character istics of the secondary electron image and of the backscattered electr on image at the topography. The intensity profile at the bottom surfac e of the groove pattern is roughly approximated by an analytical model .