PRELIMINARY-STUDY OF MICROLITHOGRAPHIC PR OPERTIES OF A RESIN WITH A POLYIMIDE AND A BIS-AZIDE SENSITIVE TO FAR-ULTRAVIOLET

Authors
SAILHAN V KASSEH A MERTZ C MONTGINOUL C GIRAL L SCHUE F
Citation
V. Sailhan et al., PRELIMINARY-STUDY OF MICROLITHOGRAPHIC PR OPERTIES OF A RESIN WITH A POLYIMIDE AND A BIS-AZIDE SENSITIVE TO FAR-ULTRAVIOLET, Die Angewandte makromolekulare Chemie, 242, 1996, pp. 65-84
Citations number
42
Categorie Soggetti
Polymer Sciences
Journal title
Die Angewandte makromolekulare Chemie → ACNP
ISSN journal
00033146
Volume
242
Year of publication
1996
Pages
65 - 84
Database
ISI
SICI code
0003-3146(1996)242:<65:POMPOO>2.0.ZU;2-U
Abstract
A preliminary study of the microlithographic properties of resins obta ined by mixing a polyimide with a bis-azide has shown the possibility to be used in the far UV. The solutions of the resins are easily proce ssed to give films with a good control of the thickness. Moreover, the films obtained are sensitive to UV irradiation at 254 nm. The irradia ted parts are insoluble in a mixture of solvents constituted of water and dioxane or water and 1-N-methylpyrrolidone, whereas the non-irradi ated regions are soluble in these solvent mixtures.