MODELING OF THREADING DISLOCATION DENSITY REDUCTION IN HETEROEPITAXIAL LAYERS .2. EFFECTIVE DISLOCATION KINETICS

The ''effective kinetics'' of threading dislocations (TDs) in growing epitaxial films is developed on the basis of the crystallographic and geometrical considerations from Part I of the paper. A system of coupl ed first-order nonlinear differential equations for twenty-four famili es of TDs is derived and solved for several initial conditions for TD densities. Numerical solutions demonstrated two general types of asymp totic behavior with increasing film thickness: linear decrease or satu ration of total TD density. This behavior agrees with experimental dat a on TD reduction in mismatched homogeneous buffer layers.